Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.



Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.



Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.



Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.



Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.



Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.


First commercial helium ion microscope

Carl Zeiss SMT said during SEMICON West July 2007 that it had shipped the worlds first ‘ORION’ Helium ion microscope, developed by a company called ALIS that it acquired in 2006 to the National Institute of Standards and Technology (NIST) in Gaithersburg, MD.

This was part of a project calls for a new microscope for direct observation and analysis of individual nanostructures at an unprecedented resolution of 0.5 Angstrom — approximately one-third the size of a carbon atom – a key dimension for atomic level research.


Image scanned by a helium ion microscope

According to Carl Zeiss SMT, this new breed of microscope is expected to provide images of unrivalled ultra-high resolution surface and material contrast, unachievable with state-of-the-art technologies of today.

The microscope uses a beam of Helium ions, which can be focused into a smaller probe size and reveal a much stronger sample interaction compared to electrons typically used in scanning electron microscopes (SEM), to generate the signals to be measured and imaged.

Scanning helium ion microscope details

1 thought on “First commercial helium ion microscope”

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