Future Lithography : or is Moore’s Law still the law? Yes it is
Intel Corp. (Santa Clara, Calif.) has decided that extreme ultraviolet (EUV) lithography will not be production-worthy by 2011 when Intel plans to begin manufacturing 22 nm microprocessors, said Mark Bohr, director of process architecture and integration at Intel’s logic technology development group. Intel plans to do 22 nm in 2011. EUV will not be ready …