104 Watt EUV Light Source for 2014 Volume Production and Ramping up from 2011
Ad Support : Nano Technology Netbook Technology News Computer Software Gigaphoton (Japan) announced a 104 watt Extreme Ultraviolet (EUV) light source which is a critical part for the realization of the first volume-production-worthy EUV light source target for 2011. It was made under the Laser Produced Plasma (LPP) Light Source Development Program for EUV Lithography, it …