EUV makes 22 Nanometer Transistors
22 nanometer lithography has been performed with EUV (extreme Ultra Violet Light). (H/T Sander Olson) Fully functional 22nm CMOS SRAM cells of 0.099µm² density have been fabricated at IMEC using ASML’s EUV Alpha Demo Tool (ADT). The new cells are 47% smaller than IMEC’s 0.186µm² cell produced at the 32nm node last year. The results …