lithography Archive

euvIBM Builds New Transistor for 5nm Technology

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IBM and its Research Alliance partners GLOBALFOUNDRIES and Samsung, and equipment suppliers have developed an industry-first process to build silicon nanosheet transistors that will enable 5 nanometer (nm) chips. The details of the process will be presented at the 2017 …

euvEUV Lithography tools shipping in 2018

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ASML expects to ship 20 to 24 extreme ultraviolet (EUV) lithography tools next year as the industry continues edging closer to production deployment of the oft-delayed next-generation lithography technology. Peter Wennink, ASML’s president and CEO, told analysts following the company’s …