lithography Archive

euvIBM Builds New Transistor for 5nm Technology

IBM and its Research Alliance partners GLOBALFOUNDRIES and Samsung, and equipment suppliers have developed an industry-first process to build silicon nanosheet transistors that will enable 5 nanometer (nm) chips. The details of the process will be presented at the 2017 …

euvEUV Lithography tools shipping in 2018

ASML expects to ship 20 to 24 extreme ultraviolet (EUV) lithography tools next year as the industry continues edging closer to production deployment of the oft-delayed next-generation lithography technology. Peter Wennink, ASML’s president and CEO, told analysts following the company’s …